Surface micromachined millimeter-scale RF system and method
US7196666B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 6, 2005 |
| Grant date | Mar 27, 2007 |
| Priority date | — |
| Expiry date | Jun 6, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01Q9/30
- WIPO fieldTelecommunications
- WIPO sectorElectrical engineering
Abstract
A surface micromachined electromagnetically radiating antenna includes a coplanar waveguide on a ground plane coated substrate having a conductor path. The conductor path is coupled to a monopole conductor, which has a generally-cylindrical backbone erected vertically from the substrate and a metal layer deposited on the backbone at a predetermined thickness. The antenna may be fabricated by depositing an epoxy on the ground plane coated substrate to a predetermined depth and according to a pattern. The epoxy is exposed to an ultraviolet source that develops one or more columns according to the pattern. A seed layer of metal may be formed on the developed column. A conductive metal is electrodeposited over the column surface to produce the monopole antenna. Other antenna may be created by adding monopoles and/or conductive metal patches and/or strips that are positioned atop the monopoles and elevated from the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.