Micro-mirror element with double binge
US7199917B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Apr 18, 2005 |
| Grant date | Apr 3, 2007 |
| Priority date | — |
| Expiry date | Apr 18, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
According to one embodiment of the present invention a micro-mirror element comprises a lower layer, a first middle layer, a second middle layer, and a micro-mirror. The lower layer includes an address portion for receiving an address voltage and a bias portion for receiving a bias voltage respectively. The first middle layer is electrically coupled to the bias portion of the lower layer. The second middle layer is electrically coupled to the first middle layer. The micro-mirror is coupled to the second middle layer and comprises a reflective surface operable to selectively tilt, in response to an application of a bias voltage and an address voltage to the lower layer, to reflect a beam of light.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.