Generation and delivery system for high pressure ultra high purity product
US7201018B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 9, 2004 |
| Grant date | Apr 10, 2007 |
| Priority date | — |
| Expiry date | Mar 19, 2025 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF17C2223/036
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
The invention relates to a process and apparatus for delivering an ultra high purity fluid comprising at least one component to a point of use at a required pressure without mechanical pumping. In one embodiment, a high purity feed comprising at least one component in gaseous or liquid form is charged into a vessel and at least partially converted to a solid phase source. As the feed is converted to a solid phase source, additional feed may be added until the vessel is at least substantially filled with a solid phase source or slush. Once filled, the solid phase source or slush may be isochorically heated whereby the solid phase source is converted to a product at an elevated pressure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.