Methods for forming composite coatings on MEMS devices
US7201937B2 · kind B2 · utility
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4References
8Claims
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Inventor
Key dates
| Filing date | Aug 15, 2003 |
| Grant date | Apr 10, 2007 |
| Priority date | — |
| Expiry date | Jan 23, 2024 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB82Y30/00
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
The present invention provides unique methods of coating and novel coatings for MEMS devices. In general a two step process includes the coating of a first silane onto a substrate surface followed by a second treatment with or without a second silane and elevated temperatures.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.