Method of manufacturing a cloverleaf microgyroscope and cloverleaf microgyroscope
US7202100B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 3, 2004 |
| Grant date | Apr 10, 2007 |
| Priority date | — |
| Expiry date | Nov 15, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5719
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention relates to a method of manufacturing a cloverleaf microgyroscope containing an integrated post comprising: attaching a post wafer to a resonator wafer, forming a bottom post from the post wafer being attached to the resonator wafer, attaching the resonator wafer to a base wafer, wherein the bottom post fits into a post hole in the base wafer, forming a top post from the resonator wafer, wherein the bottom and top post are formed symmetrically around the same axis, and attaching a cap wafer on top of the base wafer. The present invention relates further to a gyroscope containing an integrated post with on or off-chip electronics.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.