Translation mechanism for opto-mechanical inspection
US7202956B2 · kind B2 · utility
0Cited by
8References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 8, 2004 |
| Grant date | Apr 10, 2007 |
| Priority date | — |
| Expiry date | Jun 1, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/26
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus is disclosed for moving an optical component of an opto-mechanical inspection system relative to an object to be inspected using a linear actuator comprising a coil located in a magnetic field created by a magnet assembly. A translation stage is coupled to either of said coil and magnet assembly whereby the translation stage is configured for motion relative to the other of said coil and magnet assembly. Movement of the translation stage is configured along a plane that is substantially perpendicular to a direction of incident light projected from a light source through the optical component onto the object.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.