System and method for boundary estimation using CT metrology
US7203267B2 · kind B2 · utility
68Cited by
6References
62Claims
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Key dates
| Filing date | Jun 30, 2004 |
| Grant date | Apr 10, 2007 |
| Priority date | — |
| Expiry date | May 22, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG06T2211/424
- WIPO fieldComputer technology
- WIPO sectorElectrical engineering
Abstract
A technique is provided for CT reconstruction for use in CT metrology. The boundary based CT reconstruction method includes the steps of initializing a boundary of an object to obtain a boundary estimate, defining a forward model based on the boundary estimate, linearizing the forward model to obtain a system matrix and implementing an iterative image reconstruction process using the system matrix to update the boundary estimate.
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