Patent · US Expired

Machine tool control methods and designs for fabricating mesoscopic surface structures on substrates

US7203569B2 · kind B2 · utility

12Cited by
8References
32Claims
0Family size

Assignee

Inventors

Key dates

Filing dateAug 31, 2004
Grant dateApr 10, 2007
Priority date
Expiry dateJun 30, 2025

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY10T82/2502
  • WIPO fieldMachine tools
  • WIPO sectorMechanical engineering

Abstract

There is provided a machining tool for machining a workpiece on a workpiece support in response to control signals. The machining tool includes a cutting tool configured to cut a surface of the workpiece. The machining tool also includes a first displacement mechanism and a second displacement mechanism. The first displacement mechanism arranged to displace the cutting tool relative to the workpiece in a first set of coordinates in response to the control signals. The second displacement mechanism supported by the first translation mechanism and arranged to displace the cutting tool relative to the workpiece in a second set of coordinates, the second displacement mechanism capable of a higher frequency response than the first displacement mechanism. The machining tool also includes a controller configured to receive the control signals and synchronize the displacement of the cutting tool due to the first displacement mechanism with the displacement of the cutting tool due to the second displacement mechanism.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.