Machine tool control methods and designs for fabricating mesoscopic surface structures on substrates
US7203569B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 31, 2004 |
| Grant date | Apr 10, 2007 |
| Priority date | — |
| Expiry date | Jun 30, 2025 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T82/2502
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
There is provided a machining tool for machining a workpiece on a workpiece support in response to control signals. The machining tool includes a cutting tool configured to cut a surface of the workpiece. The machining tool also includes a first displacement mechanism and a second displacement mechanism. The first displacement mechanism arranged to displace the cutting tool relative to the workpiece in a first set of coordinates in response to the control signals. The second displacement mechanism supported by the first translation mechanism and arranged to displace the cutting tool relative to the workpiece in a second set of coordinates, the second displacement mechanism capable of a higher frequency response than the first displacement mechanism. The machining tool also includes a controller configured to receive the control signals and synchronize the displacement of the cutting tool due to the first displacement mechanism with the displacement of the cutting tool due to the second displacement mechanism.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.