Process for fabricating MEMS membrane with integral mirror/lens
US7208333B2 · kind B2 · utility
115Cited by
4References
10Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 8, 2004 |
| Grant date | Apr 24, 2007 |
| Priority date | — |
| Expiry date | Feb 17, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0875
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical membrane device and method for making such a device are described. This membrane is notable in that it comprises an optically curved surface. In some embodiments, this curved optical surface is optically concave and coated, for example, with a highly reflecting (HR) coating to create a curved mirror. In other embodiments, the optical surface is optically convex and coated with, preferably, an antireflective (AR) coating to function as a refractive or diffractive lens.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.