Method for forming a thin film
US7208401B2 · kind B2 · utility
13Cited by
19References
42Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 12, 2004 |
| Grant date | Apr 24, 2007 |
| Priority date | — |
| Expiry date | Jun 3, 2024 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C4/18
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Embodiments of methods, apparatuses, devices, and/or systems for forming a thin film are described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.