Fluxgate sensor integrated in a semiconductor substrate and method for manufacturing the same
US7208947B2 · kind B2 · utility
5Cited by
3References
38Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 26, 2004 |
| Grant date | Apr 24, 2007 |
| Priority date | — |
| Expiry date | Oct 17, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R15/185
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In a fluxgate sensor integrated in a semiconductor substrate and a method for manufacturing the same, the fluxgate sensor includes a soft magnetic core formed on the semiconductor substrate, an excitation coil winding the soft magnetic core and being insulated by first and second insulating layers deposited above and below the soft magnetic core, respectively, and a pick-up coil, winding the soft magnetic core and being insulated by third and fourth insulating layers deposited above and below the excitation coil, respectively.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.