Hand-held spectra-reflectometer
US7209230B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jun 20, 2005 |
| Grant date | Apr 24, 2007 |
| Priority date | — |
| Expiry date | Sep 14, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J3/0208
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention is directed to apparatus and method for measuring the spectral characteristics of an object surface. The apparatus comprises a light source for generating an input signal comprising a plurality of wavelengths of energy and a diffraction grating for diffracting the input signal into a plurality of diffracted wavelengths of energy. A resonant mirror assembly associated with the diffraction grating sequentially directs a select diffracted wavelength to the object surface to generate a corresponding reflected wavelength of energy. The apparatus further comprises a sensor for determining each select diffracted wavelength of energy directed to the object surface and a detector for detecting one or more of the reflected wavelengths. The detector is coupled with the sensor for associating each select diffracted wavelength with each corresponding reflected wavelength.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.