Fishbone diffraction-type light modulator
US7209276B2 · kind B2 · utility
2Cited by
2References
4Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 6, 2005 |
| Grant date | Apr 24, 2007 |
| Priority date | — |
| Expiry date | Oct 6, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0808
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Disclosed is a fishbone diffraction-type light modulator. In the fishbone diffraction-type light modulator, a lower micromirror is provided on a silicone substrate, and an upper micromirror is spaced apart from the silicone substrate and has a plurality of openings through both sides thereof. The upper micromirror and the lower micromirror deposited on the silicone substrate form pixels.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.