Diffractive thin-film piezoelectric micromirror and method of producing the same
US7209290B2 · kind B2 · utility
3Cited by
2References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 10, 2004 |
| Grant date | Apr 24, 2007 |
| Priority date | — |
| Expiry date | Mar 13, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0808
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Disclosed is a diffractive micromirror and a method of producing the same. More particularly, the present invention pertains to a diffractive micromirror, in which a recess having a desired depth and width is precisely formed in a piezoelectric operation manner, and a method of producing the same.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.