Micromachined inertial sensor for measuring rotational movements
US7210347B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 10, 2002 |
| Grant date | May 1, 2007 |
| Priority date | — |
| Expiry date | Dec 10, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/574
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to gyroscopes having a vibrating structure that is micromachined in a silicon substrate. A novel vibrating structure is described, which has two moving masses 14 and 14′, connected by a vibration energy coupling structure (transverse arms 26, 26′, longitudinal arms 22, 22′, and a short transverse link 24 between the longitudinal links 22, 22′). The moving masses are also suspended from U-shaped flexure arms (13), having one branch end connected to the mass and another end connected to a fixed anchoring point 18. The flexure arms are not inserted between the coupling structure and the mass, but are independent of the coupling structure. The masses are excited so as to vibrate in their plane by electrostatic forces applied by interdigitated combs 11. The Coriolis forces make them vibrate perpendicular to the plane, and this vibration is detected by electrodes forming part of the moving masses.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.