Heating element CVD system and connection structure between heating element and electric power supply mechanism in the heating element CVD system
US7211152B2 · kind B2 · utility
4Cited by
5References
8Claims
0Family size
Assignee
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Key dates
| Filing date | Sep 30, 2003 |
| Grant date | May 1, 2007 |
| Priority date | — |
| Expiry date | Sep 25, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67109
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A heating element CVD system wherein one or a plurality of connection terminal holders is placed in the processing container, and each of the connection terminal holders holds a plurality of connection terminals. Each of the connection terminals connects the heating element to the electric power supply mechanism electrically such that a connection region of the heating element connected to the connection terminal is not exposed to a space in the processing container.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.