Confocal microscope apparatus to measure a stereoscopic shape of a sample
US7211777B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | May 26, 2004 |
| Grant date | May 1, 2007 |
| Priority date | — |
| Expiry date | Oct 24, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/008
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A confocal microscope apparatus has a confocal scanner for scanning a sample with shifting a focal position of a light beam in a direction perpendicular to an optical axis, a moving mechanism for moving the focal position of the light beam in an optical axis direction, a camera for picking up an image of the sample with the light beam, and a movement control unit for controlling the moving mechanism to move the focal position of the light beam by a predetermined distance in the optical axis direction for every vertical synchronizing signal of the camera in synchronization with the vertical synchronizing signal. A high-speed three-dimensional image can be displayed in such that while measuring the sample, two or more slice images in such an arrangement on a common screen that their positions relative to the sample enables to be grasped.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.