Interferometer calibration methods and apparatus
US7212292B2 · kind B2 · utility
21Cited by
19References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 26, 2006 |
| Grant date | May 1, 2007 |
| Priority date | — |
| Expiry date | Jun 26, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG09G2360/145
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A Fabry-Perot (FP) interferometer includes substantially parallel first and second reflecting surfaces spaced apart by an optical gap between the first and second reflecting surfaces. The FP interferometer also has a mechanism for controlling the optical gap. The mechanism includes a plurality of electrostatic control plates. Each electrostatic control plate has a fixed control-plate area. Each control plate is adapted to control the optical gap by application of a control-plate voltage. The control-plate areas are related by integral ratios.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.