Electron-beam actuated light modulator with a mechanical stop
US7212328B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 22, 2005 |
| Grant date | May 1, 2007 |
| Priority date | — |
| Expiry date | Feb 22, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An electron beam actuated light modulator, including an actuatable mirror element carried by a pedestal and hinge portion, having an electrostatically more neutral first position and an electrostatically more charged second position, the mirror being actuatable in a first direction from the first position to the second position by charge accumulation, and is actuatable in a second direction from the second position to the first position by dissipation of the charge accumulation and a stop element positioned adjacent the mirror element in the first position, configured to limit movement of the mirror element in the second direction after the mirror reaches the first position traveling in the second direction.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.