X-ray confocal defect detection systems and methods
US7212607B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 2, 2006 |
| Grant date | May 1, 2007 |
| Priority date | — |
| Expiry date | Feb 2, 2026 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N23/083
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An x-ray confocal defect detection system comprises an x-ray source, a confocal component, and defect detectors and operates on a target portion of a semiconductor device. The x-ray source generates x-ray energy. The semiconductor device includes a plurality of formed layers. The target portion is a selected layer or portion of the plurality of formed layers. At least a portion of the x-ray is transmitted through the semiconductor device as transmitted x-ray. The confocal component receives the transmitted x-ray and passes target x-ray intensity from the target portion of the transmitted x-ray energy. Detectors receive the target x-ray from the confocal component from which defect analysis can be performed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.