Quadrature reduction in MEMS gyro devices using quad steering voltages
US7213458B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 22, 2005 |
| Grant date | May 8, 2007 |
| Priority date | — |
| Expiry date | Sep 24, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5719
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Devices and methods for reducing quadrature motion in a MEMS-type gyroscope are disclosed. A MEMS-type gyroscope in accordance with an illustrative embodiment of the present invention can include one or more proof masses configured to oscillate in a drive plane above a sense electrode for measuring Coriolis forces exerted on the one or more proof masses resulting from motion of the gyroscope about an input axis. One or more quad steering voltage members can be positioned adjacent each of the one or more proof masses and activated to electrostatically attract the proof masses toward the sense electrodes to reduce quadrature motion of the proof masses. A levitation force can be induced in certain embodiments to further reduce quadrature motion of the proof masses, if desired.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.