Seal assemblies
US7214041B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 6, 2004 |
| Grant date | May 8, 2007 |
| Priority date | — |
| Expiry date | Jun 20, 2024 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04C2220/12
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A seal assembly for the protection of a static seal device for use in a vacuum pump. The seal assembly comprising at least two components which are sealingly connected together, an o-ring seal, which is engaged between the two components to prevent transfer of fluid to and from the pump between these two components and a fluid channel. The fluid channel being in the plane of the o-ring and located between the o-ring seal and a process gas flow path. The fluid channel provides a path for a barrier gas to be routed when the apparatus is in use. The channel being connectable to an external source of barrier fluid and having an outlet in fluid communication with the pump swept volume.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.