Monitoring the deposition properties of an OLED
US7214554B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 18, 2004 |
| Grant date | May 8, 2007 |
| Priority date | — |
| Expiry date | Jan 5, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K71/16
Abstract
A method for making an OLED device includes providing a substrate having one or more test regions and one or more device regions, moving the substrate into a least one deposition chamber for deposition of at least one organic layer, and depositing the at least one organic layer through a shadowmask selectively onto the at least one device region and at least one test region on the substrate. The method also includes measuring a property of the at least one organic layer in the at least one test region, and adjusting the deposition process in accordance with the measured property.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.