Patent · US Expired

Monitoring the deposition properties of an OLED

US7214554B2 · kind B2 · utility

12Cited by
16References
10Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 18, 2004
Grant dateMay 8, 2007
Priority date
Expiry dateJan 5, 2025

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10K71/16

Abstract

A method for making an OLED device includes providing a substrate having one or more test regions and one or more device regions, moving the substrate into a least one deposition chamber for deposition of at least one organic layer, and depositing the at least one organic layer through a shadowmask selectively onto the at least one device region and at least one test region on the substrate. The method also includes measuring a property of the at least one organic layer in the at least one test region, and adjusting the deposition process in accordance with the measured property.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.