Transmission electron microscopy sample preparation method for electron holography
US7214935B2 · kind B2 · utility
2Cited by
2References
17Claims
0Family size
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Key dates
| Filing date | Sep 30, 2004 |
| Grant date | May 8, 2007 |
| Priority date | — |
| Expiry date | Jul 8, 2025 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2614
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method for preparing a transmission electron microscopy (TEM) sample for electron holography includes forming a sacrificial material over an area of interest on the sample, and polishing the sample to a desired thickness, wherein the area of interest is protected from rounding during the polishing. The sacrificial material is removed from the sample following the polishing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.