Driving apparatus, exposure apparatus, and device manufacturing method
US7215095B2 · kind B2 · utility
5Cited by
19References
12Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 10, 2005 |
| Grant date | May 8, 2007 |
| Priority date | — |
| Expiry date | Jul 21, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05B2219/49257
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A driving apparatus for moving an object. The apparatus includes a first actuator which drives the object in X and Y directions, a second actuator which drives a reaction force counter which receives a reaction force generated when the first actuator drives the object, and a controller which controls the second actuator on the basis of X- and Y-direction positions of the object and X- and Y-direction accelerations of the object so as to cancel, by the second actuator, the reaction force to be received by the reaction force counter when the object is driven by the first actuator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.