Piezoelectrically controllable microfluid actor system
US7217395B2 · kind B2 · utility
25Cited by
12References
26Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jan 23, 2003 |
| Grant date | May 15, 2007 |
| Priority date | — |
| Expiry date | Jun 28, 2024 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16K2099/0094
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A piezoelectrically controllable microfluid actor system, comprising a planar substrate which has at least one cavity on at least one side and has at least one passage which has an aperture in the cavity, and at least one diaphragm which has its border mounted on one side of the substrate so as to span the cavity, which has at least two superposed and interconnected diaphragm layers of which at least one is an electrically controllable piezoceramic element, and which is adapted to be deflected into the cavity by means of an electric drive.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.