MEMS scanning mirror with trenched surface and tapered comb teeth for reducing inertia and deformation
US7217587B2 · kind B2 · utility
2Cited by
2References
9Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 19, 2005 |
| Grant date | May 15, 2007 |
| Priority date | — |
| Expiry date | Oct 12, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0841
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A micro-electro-mechanical system (MEMS) device includes a mirror having a top surface with trenches, a beam connected to the mirror, rotational comb teeth connected to the beam, and one or more springs connecting the beam to a bonding pad. The mirror can have a bottom surface for reflecting light. Stationary comb teeth can be interdigitated with the rotational comb teeth either in-plane or out-of-plane. Steady or oscillating voltage difference between the rotational and the stationary comb teeth can be used to oscillate or tune the mirror. The comb teeth can have a tapered shape.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.