Capillary tubing
US7217939B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 18, 2003 |
| Grant date | May 15, 2007 |
| Priority date | — |
| Expiry date | Jul 18, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05G2/002
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
A method and an arrangement for generating x-ray or EUV radiation are disclosed. Target material is supplied from a container for target material to a jet-forming orifice in an interaction chamber by means of a flexible capillary tubing of considerable length, wherein the orifice is an integral part of the capillary tubing. A jet formed by urging target material through the orifice is made to interact with a beam of energy, thus producing a radiating plasma emitting the desired electromagnetic radiation. The use of a flexible capillary tubing for supplying target material from a source of target material to an orifice, which is integrated with the tubing, within an interaction chamber, in order to form therein a jet of target material for interaction with an energy beam to generate x-ray or EUV radiation, is also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.