Method for making a wire nanostructure in a semiconductor film
US7217946B2 · kind B2 · utility
10Cited by
1References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 2, 2003 |
| Grant date | May 15, 2007 |
| Priority date | — |
| Expiry date | May 7, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/762
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
This invention relates to a process for manufacturing nanowire structures, the process comprising the following steps:
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.