Micro-actuator, head gimbal assembly and manufacturing method thereof
US7218482B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 26, 2004 |
| Grant date | May 15, 2007 |
| Priority date | — |
| Expiry date | Jul 22, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B5/5552
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A head gimbal assembly comprising a slider having a readwrite sensor; a suspension to load the slider; a micro-actuator; wherein the micro-actuator comprises a piezoelectric unit with two piezoelectric elements and a support base having a base to be coupled with the suspension physically, a moving plate to be coupled with the two piezoelectric elements, and a leading beam to connect with the base and the moving plate. Also disclosed is a micro-actuator comprising inter alia a piezoelectric unit with two piezoelectric elements. A method of forming a micro-actuator is also disclosed, which method comprising forming a piezoelectric unit having two piezoelectric elements; forming a support base having a base, a moving plate, and a leading beam to connect with the base and the moving plate; and bonding the piezoelectric unit to one side of the support base. Also disclosed is a method of forming a slider, a suspension and a micro-actuator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.