Method of manufacturing thin film magnetic head
US7219415B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Jul 31, 2003 |
| Grant date | May 22, 2007 |
| Priority date | — |
| Expiry date | Jan 12, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49156
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
The method of manufacturing a thin film magnetic head is capable of precisely forming a core section with preventing the variation of the write-core head caused by ion milling for removing an electric conductive film and capable of improving yield of products. The method of manufacturing a thin film magnetic head, in which a core section having prescribed write-core width is formed by applying ion milling to an upper magnetic pole and a lower magnetic pole, comprises the steps of examining the write-core width of the core section; covering a surface of the core section with a protection film except an electric conductive film for preventing electro static charge of a wafer; and removing the exposed electric conductive film by ion milling.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.