Patent · US Expired

Process and device for measuring ions

US7220970B2 · kind B2 · utility

4Cited by

2References

21Claims

0Family size

Assignee

Thermo Electron (Bremen) GmbH · DE

Inventors

Lothar Rottmann · Ganderkesee, DE
Gerhard Jung · Delmenhorst, DE
Franz-Josef Mersch · Sottrum, DE

Key dates

Filing date	Dec 17, 2004
Grant date	May 22, 2007
Priority date	—
Expiry date	Feb 23, 2025

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/2444
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

The invention relates to a method and a device for the measurement of ions by coupling different measurement methods/techniques, a first detector being a collector (17) and a second detector being an SEM (18), and the ions to be measured or resulting secondary particles being selectively delivered to the collector or the SEM. The SEM (18) is operated selectively in analog mode or count mode. The collector (17) is provided with an integrator.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.