Ultrasonic transducer and method of manufacturing ultrasonic transducer
US7224098B2 · kind B2 · utility
0Cited by
2References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 24, 2005 |
| Grant date | May 29, 2007 |
| Priority date | — |
| Expiry date | Sep 11, 2025 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB06B1/0292
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
The present invention relates to an ultrasonic transducer that has a diaphragm in which an electrode layer is formed thereon. A fixed electrode having a plurality of asperities on the surface facing the diaphragm is provided. An alternating current signal is applied between the electrode layer formed on the diaphragm and the fixed electrode to generate ultrasonic waves. A groove is formed on the upper surface of the projections of the asperities of the fixed electrode to prevent the diaphragm from sticking to the fixed electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.