Dielectric barrier discharge lamp with a base
US7224111B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 14, 2003 |
| Grant date | May 29, 2007 |
| Priority date | — |
| Expiry date | May 14, 2023 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J65/046
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An elongated dielectric barrier discharge lamp with outer and inner electrodes has a tube that is arranged on the lamp stand end of the discharge vessel and that surrounds the lamp stand. The tube serves to receive a seal in order to install the lamp in a process chamber in a gastight manner. Power supply of the outer electrodes is separated from the power supply for the inner electrodes coming out of the lamp stand by means of the above-mentioned tube. This makes it possible to prevent effectively parasitic discharges between the power supplies which are applied at different potentials during operation also in process chambers under negative pressure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.