Physical quantity sensing element having improved structure suitable for electrical connection and method of fabricating same
US7224257B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Dec 20, 2004 |
| Grant date | May 29, 2007 |
| Priority date | — |
| Expiry date | Jun 30, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L1/18
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A physical quantity sensing element according to the invention includes an insulating layer and a sensing layer. The sensing layer is configured to generate an electrical signal as a function of a physical quantity applied thereto and has a surface that includes a first and a second area. The first area is completely covered with the insulating layer so that the physical quantity is to be applied to both the insulating layer and the sensing layer through the first area; the second area is exposed to an application direction of the physical quantity without being covered with the insulating layer and being subject to application of the physical quantity. With such a structure, easy and reliable electrical connection of the physical quantity sensing element with external devices and circuits is ensured. In addition, several practical methods of fabricating the physical quantity sensing element according to the invention are also provided.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.