Mapping-measurement apparatus
US7224460B2 · kind B2 · utility
4Cited by
4References
6Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 21, 2004 |
| Grant date | May 29, 2007 |
| Priority date | — |
| Expiry date | May 9, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2201/117
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A mapping-measurement apparatus includes a light illumination unit, a photodetector for detecting, through an aperture, reflection light or transmission light from a sample, and adjustable scanning mirrors on the illumination and detection sides of the sample, each mirror having two independent rotational axes about which they can be independently rotated by a controller. The aperture restricts light incident on the photodetector from a predetermined portion of the sample surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.