Valve device
US7228687B2 · kind B2 · utility
Assignee
Inventor
Key dates
| Filing date | Aug 12, 2004 |
| Grant date | Jun 12, 2007 |
| Priority date | — |
| Expiry date | Aug 18, 2025 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04B37/08
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A valve device, according to the invention, for connecting to a cryopump, wherein the valve device comprises a body with a through-channel and a connection flange at one end of the through-channel for connecting to a backing pump connection flange of the cryopump; a pressure relief valve which opens when an overpressure in the through-channel exceeds a limiting valve and which lets this overpressure out of the through-channel; a purge gas line in which a purge gas valve is arranged and which serves to supply a purge gas to a supply line of the cryopump during a regeneration process of the cryopump; wherein an end portion of the purge gas line by which the purge gas line can be connected to the supply line of the cryopump runs within the through-channel to the area of the end of the through-channel situated in the connection flange. A pump arrangement according to the invention is also disclosed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.