Fluid sensing device with integrated bypass and process therefor
US7228735B2 · kind B2 · utility
34Cited by
12References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 21, 2005 |
| Grant date | Jun 12, 2007 |
| Priority date | — |
| Expiry date | Dec 13, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2009/006
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A micromachined fluid sensing device and a method for its fabrication. The sensing device incorporates a bypass passage, preferably an integral bypass passage within the device, that enables a volume of fluid to be delivered to the device, with a limited portion of the fluid passing through a passage within the device in which one or more properties of the fluid are sensed, such as but not limited to density, specific gravity, and chemical concentrations. The device is suitable for monitoring the fuel concentration in a fuel mixture for a fuel cell.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.