Methods for SEM inspection of fluid containing samples
US7230242B2 · kind B2 · utility
13Cited by
41References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 1, 2003 |
| Grant date | Jun 12, 2007 |
| Priority date | — |
| Expiry date | Jan 29, 2024 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2608
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of visualizing a sample in a wet environment including introducing a sample into a specimen enclosure in a wet environment and scanning the sample in the specimen enclosure in a scanning electron microscope, thereby visualizing the sample.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.