Method and apparatus for sensing a temperature along an optical path in semiconductor material
US7231150B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 23, 2002 |
| Grant date | Jun 12, 2007 |
| Priority date | — |
| Expiry date | Sep 12, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01K7/22
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A temperature sensing and control method and apparatus. In one aspect of the present invention, an apparatus according to the teachings of the present invention includes an optical path disposed in semiconductor material. A four-terminal resistor is defined in the semiconductor material. At least a portion of the optical path is directed through the four-terminal resistor. The four-terminal resistor includes a first pair of terminals between which a probe current is to be injected. The four-terminal resistor also includes a second pair of terminals between which a voltage drop is to be measured so as to determine a resistance along the portion of the optical path directed through the four-terminal resistor. Temperature may be derived from the determined resistance of the four-terminal resistor. In one embodiment, the temperature of the semiconductor material may then be controlled with a heater in response to the derived temperature.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.