Radiation source for the generation of short-wavelength radiation

US7233013B2 · kind B2 · utility

Assignee

• XTREME technologies GmbH · DE

Inventors

• Guido Hergenhan
• Kai Gaebel · Jena, DE
• Thomas Brauner · Berlin, DE

Key dates

• Filing date: Mar 30, 2006
• Grant date: Jun 19, 2007
• Expiry date: Mar 30, 2026

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/70916
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

In a radiation source for the generation of short-wavelength radiation, it is the object of the invention to effectively increase the protection of the collimator optics by a buffer gas without substantially reducing the radiation transmission. A vacuum chamber which encloses a radiation-emitting plasma and is outfitted with at least one feed line and one outlet line for a buffer gas in order to ensure protection against debris for at least one optical element which directs the radiation to a radiation outlet opening in the vacuum chamber has chamber areas with particle deceleration of varying magnitude by the buffer gas. The particle deceleration is greater at least in a first chamber area in which the optical element is arranged than in any other chamber area.