Capacity load type probe, and test jig using the same
US7233156B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 6, 2003 |
| Grant date | Jun 19, 2007 |
| Priority date | — |
| Expiry date | Feb 6, 2023 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01R1/06722
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A plurality of probes such as a signal probe (3) and a power supply probe (4) are provided into a metal block (1) so as to penetrate. Each of the probes has a movable pin (11). A tip of the movable pin is projecting from one surface of the metal block (1). And a projection length of the tip is variable. A DUT 20 is pressed onto the surface of the metal block (1) to contact between electrode terminals (21 to 24) and tips of the probes to test characteristics of the DUT. At least one of the probes is capacity loaded probe having a capacitor by providing a dielectric layer and a metal film to peripheral of the probe. As a result, noise can be removed reliably. Additionally, when the capacity loaded probe is used as the power supply probe, a voltage drop is reduced at the power supply terminal in a case of change of the output.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.