Radio frequency MEMS switch contact metal selection
US7235750B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 31, 2005 |
| Grant date | Jun 26, 2007 |
| Priority date | — |
| Expiry date | Jan 28, 2026 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H2001/0052
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method for selecting metal alloys as the electric contact materials for microelectromechanical systems (MEMS) metal contact switches. This method includes a review of alloy experience, consideration of equilibrium binary alloy phase diagrams, obtaining thin film material properties and, based on a suitable model, predicting contact electrical resistance performance. After determination of a candidate alloy material, MEMS switches are conceptualized, fabricated and tested to validate the alloy selection methodology. Minimum average contact resistance values of 1.17 and 1.87 ohms are achieved for micro-switches with gold (Au) and gold-platinum (Au-(6.3 at %)Pt) alloy contacts. In addition, ‘hot-switched’ life cycle test results of 1.02×108 and 2.70×108 cycles may be realized for micro-switches with Au and Au-(6.3 at %)Pt contacts. These results indicate increased wear with a small increase in contact resistance for MEMS switches with metal alloy electric contacts.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.