Replica micro-resonator and method of fabrication
US7236664B2 · kind B2 · utility
9Cited by
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28Claims
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Key dates
| Filing date | Sep 29, 2004 |
| Grant date | Jun 26, 2007 |
| Priority date | — |
| Expiry date | Dec 25, 2024 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B2006/1219
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Polymer micro-resonators and methods of fabricating the same. A liquid polymer material is applied to a micro-resonator master that includes at least one micro-resonator, such as a disk or toroid micro-resonator. The liquid molding material is cured or set to form a mold that is derived from the master. A replica of the master micro-resonator is cast using the mold, and the replicated micro-toroid resonator(s) are separated from the mold. The polymer micro-resonators can have Q factors up to about 5×106. The mold and replica materials can be a silicone material, such as polydimethylsiloxane.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.