Method of fabricating a write element with a reduced yoke length
US7238292B1 · kind B1 · utility
151Cited by
19References
41Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 30, 2004 |
| Grant date | Jul 3, 2007 |
| Priority date | — |
| Expiry date | Oct 20, 2024 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49041
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A head including a write element for writing data to a magnetic media, and methods for its production are provided. A write element of the invention includes one or more of a recessed first pole, a heat sink layer, and a shortened yoke length. A method of the invention provides forming an anti-reflective layer before forming a mask layer. During photolithography the anti-reflective layer suppresses undesirable reflections off of features, such as vertical sidewalls, that otherwise limit how closely to such features portions of the mask layer can be formed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.