Integrated optical MEMS devices
US7238621B2 · kind B2 · utility
4Cited by
5References
17Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 17, 2005 |
| Grant date | Jul 3, 2007 |
| Priority date | — |
| Expiry date | May 17, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/0833
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A method for fabricating an optical device and micromechanical device, wherein both devices are monolithically-integrated with a substrate. The optical surfaces and micromechanical devices are each formed in an etch step that is well-suited for forming that device. In addition, the embodiments of the present invention enable the optical surface and micromechanical device to be fabricated irrespective of severe topography on the surface of the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.