Ruthenium compound and process for producing a metal ruthenium film
US7238822B2 · kind B2 · utility
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2Claims
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Key dates
| Filing date | Sep 17, 2003 |
| Grant date | Jul 3, 2007 |
| Priority date | — |
| Expiry date | Feb 2, 2024 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC07C51/00
- WIPO fieldOrganic fine chemistry
- WIPO sectorChemistry
Abstract
A ruthenium compound from which high-quality film-like metal ruthenium can be obtained and a process for producing a metal ruthenium film from the ruthenium compound by chemical vapor deposition.The ruthenium compound as a material for chemical vapor deposition is represented by the following formula (1), for example
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