Pyrolyzed-parylene based sensors and method of manufacture
US7238941B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 25, 2004 |
| Grant date | Jul 3, 2007 |
| Priority date | — |
| Expiry date | Mar 6, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/20
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method (and resulting structure) for fabricating a sensing device. The method includes providing a substrate comprising a surface region and forming an insulating material overlying the surface region. The method also includes forming a film of carbon based material overlying the insulating material and treating to the film of carbon based material to pyrolyzed the carbon based material to cause formation of a film of substantially carbon based material having a resistivity ranging within a predetermined range. The method also provides at least a portion of the pyrolyzed carbon based material in a sensor application and uses the portion of the pyrolyzed carbon based material in the sensing application. In a specific embodiment, the sensing application is selected from chemical, humidity, piezoelectric, radiation, mechanical strain or temperature.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.