Flexure stage
US7239107B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 24, 2006 |
| Grant date | Jul 3, 2007 |
| Priority date | — |
| Expiry date | Feb 24, 2026 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T74/20594
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
In one embodiment, a flexure stage comprises a base, a stage, a positioning mechanism, and a control device. The base and stage have first and second portions that are spaced apart from each other. The positioning mechanism is coupled between the base and the stage. The positioning mechanism includes an actuator and a flexure structure engaged by the actuator. The flexure structure includes base links coupled to the first base portion, stage links coupled to the first stage portion, and an intermediate link coupled to both the base and stage links. All structures are coupled by flexure hinge connections. The control device generates a control signal to change position of the stage by sending a control signal to the actuator which provides a force to elastically deform the flexure structure and correspondingly move the stage.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.