Gantry-type XY stage
US7239161B2 · kind B2 · utility
12Cited by
1References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 28, 2004 |
| Grant date | Jul 3, 2007 |
| Priority date | — |
| Expiry date | Jul 9, 2025 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B7/005
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Nine vibration isolating mounts are disposed on a pedestal, and a granite plate is placed thereon. A pair of guide bases are disposed on the granite plate, and disposed thereon are a pair of posts made of CFRP for movements in a Y-direction relative to the granite plate. A beam made of CFRP is extended between the pair of posts. Further, a movement base is disposed for movement in an X-direction relative to the beam, and a laser optical unit is mounted on the movement base.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.